The technical parameters of CS-4 and CS-6 probe stations are compared as follows:
CS-4 Probe Station:
· Chuck size: 4 inches
· Horizontal rotation: Rotates 360 degrees, adjustable 15 degrees, precision 0.1 degrees, with angle lock device
· XY travel range: 4 inches * 4 inches
· X-Y travel precision: 10um
· Sample stage Z axis adjustment: Adjustable up and down 8mm
· Sample fixation: Vacuum adsorption, central adsorption hole, multi-loop adsorption ring
· Probe platform: U-shaped probe platform, can hold up to 6 probe holders
· Back electrode testing: Electrically independent suspension of the sample stage, 4mm socket for connecting back electrodes
· Microscope type: Single-tube microscope/stereomicroscope
· Magnification: 16X-100X
· Travel range: Horizontal rotation around vertical column 360 degrees, Z axis 50.8mm
· Light source: External LED adjustable brightness ring light source
· CCD: 200/500/1200
· XY-Z travel range: 12mm * 12mm * 12mm
· Travel precision: 10um/2um/0.7um/0.5um/0.35um
· Adhesion method: Magnetic adsorption/Vacuum adsorption
· Cable type: Coaxial cable/Triaxial cable/RF cable
· Leakage current precision: 10pA/100fA/10fA
· Fixed probe method: Spring fixation/Tube fixation
· Connector type: BNC/Triaxial/Banana head/Alligator clip/Terminal block/RF interface
· DC needle diameter: 0.2um/lum/2um/5um/10um/20um/50um/100um
· RF probe frequency: 40GHz/50GHz/67GHz/110GHz
· Material: Tungsten steel/Beryllium copper/Nickel plating
· Overall dimensions: 400mm long * 400mm wide * 500mm high
· Weight: Approximately 25kg
· Optional accessories include heating platform, shielding box, display, shock-resistant table, adaptors, gold plated chuck, RF test fixtures and optoelectronic test fixtures.
CS-6 Probe Station:
· Chuck size: 6 inches
· Horizontal rotation: Rotates 360 degrees, adjustable 15 degrees, precision 0.1 degrees, with angle lock device
· XY travel range: 4 inches * 4 inches
· X-Y travel precision: 10um
· Sample stage Z axis adjustment: Adjustable up and down 8mm
· Sample fixation method: Vacuum adsorption, central adsorption hole, multi-loop adsorption ring
· Probe platform: U-shaped probe platform, can hold up to 6 probe holders
· Back electrode testing method: Electrically independent suspension of the sample stage, 4mm socket for connecting back electrodes
· Microscope type: Single-tube microscope/stereomicroscope