A probe station is a core precision testing equipment in the semiconductor industry. Its main function is to make precise contact with the electrodes of a wafer or chip using micron‑scale metal probes before packaging, for electrical performance measurement and functional verification.

Core Definition

A probe station is an integrated platform that combines ultra‑precision mechanical positioning, micro‑manipulation, optical imaging, and electrical measurement. It forms temporary electrical contact with chip pads or bumps via nanometer‑precision probes, enabling accurate testing of parameters such as current, voltage, resistance, and frequency.

Key Components

Chuck: Vacuum‑absorbs and holds the wafer; supports heating/cooling (‑65°C ~ 300°C) to simulate different operating temperatures.

Probes and Manipulators: Tungsten or rhenium‑tungsten probes with tips of a few microns; nanometer‑scale movement and contact force control in XYZ axes.

Microscopic Imaging System: High‑magnification optical microscope (up to 1000×+) for probe alignment.

Shielding and Anti‑Vibration System: Isolates external vibration and electromagnetic interference to ensure stable testing.

Main Applications

Wafer‑Level Testing (Most Critical)

Perform electrical testing on every die on an uncut wafer to screen out defective chips and avoid packaging costs on bad devices.

Provide feedback to upstream processes to optimize manufacturing and improve yield.

R&D and Failure Analysis

Verify electrical characteristics of new devices or processes to accelerate chip development.

Locate fault points and analyze failure causes.

Specialized Testing

RF / Millimeter‑Wave: High‑frequency performance testing for 5G/6G and radar chips.

Power Devices: High‑voltage, high‑current testing for IGBT, SiC, etc.

Optoelectronic Devices: Simultaneous electrical and optical testing for LED chips.

High/Low Temperature / Vacuum: Reliability verification for automotive and aerospace devices under extreme environments.

Common Types

Manual Probe Station: Low cost, flexible; suitable for lab and small‑batch testing.

Semi‑Automatic / Automatic Probe Station: Automatic alignment and batch testing; used in mass production.

Specialized Probe Stations: Customized for RF, high/low temperature, vacuum, power devices, etc.