Classification and Corresponding Parameter Explanation of High-Low Temperature Probe Stations

The high-low temperature probe station is a process test instrument used in the fields of information science and system science. It is mainly used to test the electrical characteristics of microstructured semiconductor devices, microelectronic devices, and materials under different environments and temperature conditions. Depending on their functionality and application areas, high-low temperature probe stations can be classified into multiple types, including but not limited to:

Vacuum High-Low Temperature Probe Station: This type of probe station can perform high-low temperature testing in a vacuum environment, suitable for characterizing and measuring the electrical properties of materials under vacuum conditions. Its temperature range typically spans from liquid helium temperature (approximately 4K) to high temperatures (such as 475K), with high-precision temperature control and stability.

RF High-Low Temperature Probe Station: This type of probe station can conduct RF testing under high-low temperature conditions, suitable for characterizing the RF characteristics of semiconductor devices. Its temperature range and temperature control accuracy are similar to those of the vacuum high-low temperature probe station, but it also has RF testing capabilities, allowing for the measurement of RF parameters of devices.

Optical High-Low Temperature Probe Station: This type of probe station combines optical microscopy with high-low temperature testing capabilities, enabling the observation of the microstructure of samples and electrical performance testing under high-low temperature conditions. Its temperature range and temperature control accuracy are similar to other types of high-low temperature probe stations, but it also features a high-resolution optical microscope, allowing for micrometer-level observations of samples.

The corresponding parameter explanations are as follows:

Temperature Range: Refers to the lowest and highest temperature range that the probe station can provide, typically measured in Kelvin (K). Different high-low temperature probe stations have different temperature ranges, suitable for different testing requirements.

Temperature Control Accuracy: Refers to the precision with which the probe station controls the temperature, typically expressed in degrees Celsius (℃) or Kelvin (K). The higher the temperature control accuracy, the more accurate and reliable the test results.

Temperature Stability: Refers to the ability of the probe station to maintain a stable temperature at the set temperature, typically measured in degrees Celsius per minute (℃/min) or Kelvin per minute (K/min). Better temperature stability leads to more reliable test results.

Sample Size and Shape: Refers to the range of sample sizes and shapes that the probe station can accommodate. Different high-low temperature probe stations have different sample stage size and shape requirements, which need to be selected based on specific testing needs.

Probe Quantity and Type: Refers to the number and type of probes equipped on the probe station. Different high-low temperature probe stations have different probe quantities and types, which can be selected and configured based on testing requirements.

It is worth noting that the above are only some common parameter explanations for high-low temperature probe stations. Actual parameters may vary depending on different models and manufacturers. When selecting a high-low temperature probe station, it is necessary to choose the appropriate model and technical parameters based on specific application needs and testing requirements.