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Anatomy of a Probe Station System
2018-10-054523
Anatomy of a Probe Station System

The probe station system is divided into a manual probe station and an automatic probe station. Below we mainly analyze the manual probe station:

Probe station use:
The manual probe station is also known as the probe test station. The main purpose is to provide a test platform for the electrical parameter test of semiconductor chips. The instrument can complete the voltage, current, resistance, and capacitor voltage characteristic curves of the integrated circuit. It is suitable for scientific research analysis, spot check and other purposes of chip.

Composition of the probe station system:

Probe table base + microscope + probe holder + probe holder + probe + test source table Test source table to complete)

Probe station test environment:

Available test environments are: normal temperature, high temperature, high and low temperature test, vacuum high and low temperature, high pressure, radiation and magnetic field environment.

The tests that can rely on the probe station are:

Serial number

Classification according to test samples

Serial number

Classification according to test samples

Serial numbe

Serial number
Classified by application

1

Wafer test

1

RF test

2

LED test

2

High temperature environment test

3

Power device testing

3

Low current (100fA level) test

4

MEMS testing

4

I-v / c-v / p-iv test

5

PCB test

5

High voltage, high current test

6

LCD panel test

6

Magnetic field environmental test

7

Solar cell test

7

Radiation environment test

8

Material surface resistivity test

9

Integrating sphere test



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