CH-12 large-sized comprehensive probe station-Shenzhen Cindbest Technology Co., Ltd.

CH-12 large-sized comprehensive probe station

Modular design, seamless upgrade, up to 12 inch wafer, high precise screw drive structure, linear movement, quick and fine-tuning lift function for chuck stage, capable for Wafer test, PCB/IC test, RF test, high voltage and current test.

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CH-12 |8~12" large-sized comprehensive probe station

FEATURES / APPLICATION

◆ Up to 12 inch wafer

◆ High precise screw drive structure, linear movement

◆ Quick and fine-tuning lift function for chuck stage

◆ Compatible with multiple types of microscope

◆ Capable for Wafer test, PCB/IC test, RF test, high voltage and current test

◆ Modular design, seamless upgrade

Specifications

Chuck stage

Model	CH-12
Chuck size	8"/12" upon request
Rotation angle	360°with angle locking, fine-tuning for 15° with 0.1μm resolution
X-Y travel range	8"8"/12"12" upon request
X-Y travel resolution	10μm/1μm
Sample holding mode	Vacuum adsorption
Chuck capacity	U shape, up to 10 micropositioners
Stage lift ability	6mm-quick lift /25mm fine tuning
Electrical design	Chuck back is electrical floating, can be used as gate electrode
Dimension	840(L)600(W)700mmH/950(L)700(W)700mm(H)
Weight	100KG/150KG

Stereo Microscope

Model	Single tube microscope /stereo microscope /metalloscope
Magnification	16X-200X/20X-4000X
Travel range	X-Y up to 2"*2", vertical to 50.8mm
CCD Camera	CCD Camera
CCD Pixel	200W Pixel / 500W Pixel /1200W Pixel

Micropositioner

X-Y-Z Moving range	12mm-12mm-12mm
Resolution	10um / 2um / 0.7um/0.5um
Adsorption mode	Magnetic/vacuum
Cable	Coaxial / triaxial
Leakage current	10pA/100fA/10fA upon request
Cable connector	Banana head /Crocodile clip /Coaxial /Triaxial
Probe tip diameter	0.2um/1um/2um/5um/10um/20um upon request
Probe metal	Tungsten/Beryllium copper upon request