Sealed chamber, optimized design with low liquid nitrogen consumption.
No frost, high precise screw drive structure, linear movement.
CT-6 |6~12" non-vaccum high and low temperature probe station
Features / Applications
◆ Up to 12 inches wafer
◆ Sealed chamber, isolated from external interference
◆ Optimized design with low liquid nitrogen consumption
◆ No frost under low temperature
◆ High precise screw drive structure, linear movement
◆ Compatible for multiple types of microscope
◆ Modular design, seamless upgrade
◆ Non-standard product, can be customized upon request
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Specifications
Chuck stage
Model |
CT-6/CT-8/CT-12 |
Chuck size |
6"/8"/12" |
Rotation angle |
360°with angle locking, fine-tuning for 15° with 0.1μm resolution |
X-Y travel range |
6"*6"/8"*8"/12"*12" |
X-Y travel resolution |
10μm/1μm |
Sample mounting type |
Vacuum |
Chuck capacity |
U shape, up to 12 micropositioners |
Electrical design |
Electrical floating on chuck back, can be used as gate electrode |
Optical system
Microscope |
Single tube microscope /stereo microscope /metalloscope |
Magnification |
16X-200X/20X-4000X |
Travel range |
X-Y up to 2"*2", vertical to 50.8mm |
Camera |
CCD Camera |
Illumination |
Coaxial and ring light |
Micropositioner
X-Y-Z travel range |
12mm-12mm-12mm |
Resolution |
10um/2um/0.7um/0.5um |
Mounting type |
Magnetic/vacuum |
Cable |
Coaxial/triaxial |
Leakage current |
10pA/100fA/10fA upon request |
Cable adaptor |
Banana head /Crocodile clip /Coaxial /Triaxial |
Probe tip diameter |
0.2um/1um/2um/5um/10um/20um upon request |
Probe metal |
Tungsten/Beryllium copper upon request |
Optional accessories
Hot chuck |
Display screen |
Connector |
RF testing accessoriess |
Shielding box |
Vibration free table |
Optical platform |
Gold plated Chuck |
Light intensity / wavelength testing |
High voltage test accessories |
Microscope quick inclining device |
Laser system |
Probe card clamp |
Specifications and designs are subject to change without notice.
Shenzhen Cindbest Technology Co., Ltd |
Shenzhen Cindbest Technology Co., Ltd
Add: 8F Weihuada Industrial Park No.5 Lirong Rd Xinshi Com Dalang St Longhua Dist Shenzhen,China
Tel: 0755-29412885 E-mail: aldrich@cindbest.com; |