CH-8 large-sized comprehensive probe station-Shenzhen Cindbest Technology Co., Ltd.

CH-8 large-sized comprehensive probe station

Modular design, seamless upgrade, up to 12 inch wafer.

Quick and fine-tuning lift function for chuck stage.

Capable for Wafer test, PCB/IC test, RF test, high voltage and current test.

CH-8 | 8~12" large-sized comprehensive probe station

Features/Applications

◆ Up to 12 inch wafer

◆ High precise screw drive structure, linear movement

◆ Quick and fine-tuning lift function for chuck stage

◆ Compatible with multiple types of microscope

◆ Capable for Wafer test, PCB/IC test, RF test, high voltage and current test

◆ Modular design, seamless upgrade

Specifications

Chuck stage

Model	CH-8/CH-12
Chuck size	8"/12"
Rotation range	360°with angle locking, fine-tuning for 15° with 0.1° resolution
X-Y travel range	8"8"/12"12"
X-Y travel resolution	10μm/1μm
Sample mounting mode	Vacuum
Chuck capacity	U shape, up to 10 micropositioners
Stage lift ability	6mm-quick lift. 25mm fine-tuning
Electrical design	Electrical floating on chuck back, can be used as gate electrode
Dimension	840(L)600(W)700mmH/950(L)700(W)700mm(H)
Weight	100KG/150KG

Optical system

Microscope	Single tube microscope /stereo microscope / metalloscope
Magnification	16X-200X/20X-4000X
Travel range	X-Y up to 2"*2", vertical to 50.8mm
Camera	CCD Camera

Micropositioner

X-Y-Z travel range	12mm-12mm-12mm
Resolution	10μm/2μm/0.7μm/0.5μm
Mounting mode	Magnetic/vacuum
Cable	Coaxial / triaxial
Leakage current	10pA/100fA/10fA upon request
Cable connector	Banana head /Crocodile clip /Coaxial /Triaxial
Probe tip diameter	0.5μm/1μm/2μm/5μm/10μm/20μm upon request
Probe metal	Tungsten/Beryllium copper upon request